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فرایند پلاسمای مایکرویو
4.5 Radio- and Microwave Plasma Processes 64
However, when considering microwave plasma processes, where the temperatures rarely exceed 700 K, there is a good chance of obtaining nonequilibrium structures or combinations of such materials.
Size limitations by charging the particles are observed for the microwave plasma process and special variants of the ?
Radio- and Microwave Plasma Processes
This situation is entirely different from that of the microwave plasma process, where the particles originating in the plasma zone carry electric charges.
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